DIFF Subgroup Additional Only
H01J 2237/164 Particle-permeable windows
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Vessels > Particle-permeable windows
H01J 2237/164 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Vessels > Particle-permeable windows