Lithography

Full Title

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Processing objects on a microscale > Lithography

Of 8 combined children, 0 exist in both systems.

8 codes are CPC-only extensions.

Note: 8 CPC extensions are marked as secondary classification only.

This code exists only in CPC.

Diff view requires codes present in both systems.

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