Lithography

Full Title

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Processing objects on a microscale > Lithography

8 direct subcodes

Child Classifications

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H01J 2237/31752 using particular beams or near-field effects, e.g. STM-like techniques
H01J 2237/31761 Patterning strategy
H01J 2237/31769 Proximity effect correction
H01J 2237/31772 Flood beam
H01J 2237/31774 Multi-beam
H01J 2237/31776 Shaped beam
H01J 2237/31777 by projection
H01J 2237/31793 Problems associated with lithography