Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof > Details > Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement > Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Details > Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement > Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators