Arrangements enabling beams to pass between regions of different pressure

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof > Electron-beam or ion-beam tubes for localised treatment of objects > Arrangements enabling beams to pass between regions of different pressure

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Electron-beam or ion-beam tubes for localised treatment of objects > Arrangements enabling beams to pass between regions of different pressure