Full Title

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Electron-beam or ion-beam tubes for localised treatment of objects > Controlling tubes by external information, e.g. program control (H01J37/304 takes precedence)