DIFF Subgroup
H10P 32/18 Full Title
Diffusion of dopants within, into or out of wafers, substrates or parts of devices (during formation of materials H10P14/00) > Diffusion of dopants within, into or out of semiconductor bodies or layers
H10P 32/18 Diffusion of dopants within, into or out of wafers, substrates or parts of devices (during formation of materials H10P14/00) > Diffusion of dopants within, into or out of semiconductor bodies or layers