DIFF Subgroup
H10P 32/302 Full Title
Diffusion of dopants within, into or out of wafers, substrates or parts of devices (during formation of materials H10P14/00) > Diffusion for doping of conductive or resistive layers
H10P 32/302 Diffusion of dopants within, into or out of wafers, substrates or parts of devices (during formation of materials H10P14/00) > Diffusion for doping of conductive or resistive layers