IPC Subgroup
C23C 14/22 characterised by the process of coating
Introduced: January 1985
Last revised: January 2006
Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating
Classification Context
- Section:
- CHEMISTRY; METALLURGY
- Class:
- COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- Subclass:
- COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
7 direct subcodes
Child Classifications
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- C23C 14/24 Vacuum evaporation
- C23C 14/34 Sputtering
- C23C 14/48 Ion implantation
- C23C 14/5 Substrate holders
- C23C 14/52 Means for observation of the coating process
- C23C 14/54 Controlling or regulating the coating process
- C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks