CPC Subgroup
C23C 14/22 characterised by the process of coating
Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating
11 direct subcodes
Child Classifications
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- C23C 14/24 Vacuum evaporation
- C23C 14/34 Sputtering
- C23C 14/48 Ion implantation
- C23C 14/50 Substrate holders
- C23C 14/52 Means for observation of the coating process
- C23C 14/54 Controlling or regulating the coating process
- C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Top Applicants
Top 10 applicants by patent filingsfor class C23, 2013–2023, worldwide · Source: EPO PATSTAT
- APPLIED MATERIALS US 10,596
- TOKYO ELECTRON JP 5,229
- LAM RESEARCH CORPORATION US 3,622
- NIPPON STEEL CORPORATION JP 3,171
- JFE STEEL JP 3,128
- ASM IP HOLDING NL 2,722
- ARCELORMITTAL LU 2,481
- TOKYO ELECTRON 2,359
- APPLIED MATERIALS 2,284
- CHINESE ACADEMY OF SCIENCES 2,110