CPC Subgroup
C23C 14/22 characterised by the process of coating
Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating
11 direct subcodes
Child Classifications
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- C23C 14/24 Vacuum evaporation
- C23C 14/34 Sputtering
- C23C 14/48 Ion implantation
- C23C 14/50 Substrate holders
- C23C 14/52 Means for observation of the coating process
- C23C 14/54 Controlling or regulating the coating process
- C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks