Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement

Full Title

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof > Details > Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement

Classification Context

Section:

ELECTRICITY

Class:

ELECTRIC ELEMENTS

Subclass:

ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

Child Classifications

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• H01J 37/05 Electron- or ion-optical arrangements for separating electrons or ions according to their energy
• H01J 37/06 Electron sources; Electron guns
• H01J 37/08 Ion sources; Ion guns
• H01J 37/09 Diaphragms; Shields associated with electron- or ion-optical arrangements; Compensation of disturbing fields
• H01J 37/1 Lenses
• H01J 37/147 Arrangements for directing or deflecting the discharge along a desired path
• H01J 37/153 Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators