CPC Subgroup
H01J 37/04 Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
Full Title
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Details > Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
8 direct subcodes
Child Classifications
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- H01J 37/05 Electron or ion-optical arrangements for separating electrons or ions according to their energy (particle separator tubes H01J49/00)
- H01J 37/06 Electron sources; Electron guns
- H01J 37/08 Ion sources; Ion guns
- H01J 37/09 Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
- H01J 37/10 Lenses
- H01J 37/147 Arrangements for directing or deflecting the discharge along a desired path ( lenses H01J37/10)
- H01J 37/153 Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators