Electron-beam or ion-beam tubes for localised treatment of objects

Full Title

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof > Electron-beam or ion-beam tubes for localised treatment of objects

Classification Context

Section:

ELECTRICITY

Class:

ELECTRIC ELEMENTS

Subclass:

ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

Child Classifications

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• H01J 37/301 Arrangements enabling beams to pass between regions of different pressure
• H01J 37/302 Controlling tubes by external information, e.g. program control
• H01J 37/304 Controlling tubes by information coming from the objects, e.g. correction signals
• H01J 37/305 for casting, melting, evaporating, or etching
• H01J 37/31 for cutting or drilling
• H01J 37/315 for welding
• H01J 37/317 for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation