IPC Subgroup
H01J 37/32 Gas-filled discharge tubes
Introduced: September 1968
Last revised: January 2006
Full Title
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof > Gas-filled discharge tubes
Classification Context
- Section:
- ELECTRICITY
- Class:
- ELECTRIC ELEMENTS
- Subclass:
- ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2 direct subcodes
Child Classifications
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- H01J 37/34 operating with cathodic sputtering
- H01J 37/36 for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation