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IPC Subgroup
H01J 37/32

Gas-filled discharge tubes

Introduced: September 1968

Last revised: January 2006

Full Title

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof > Gas-filled discharge tubes

Classification Context

Section:
ELECTRICITY
Class:
ELECTRIC ELEMENTS
Subclass:
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

2 direct subcodes

Child Classifications

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  • H01J 37/34 operating with cathodic sputtering
  • H01J 37/36 for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation