Physical vapour deposition [PVD]

Full Title

Formation of materials, e.g. in the shape of layers or pillars > of conductive or resistive materials > using a gas or vapour > Physical vapour deposition [PVD]

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS

Child Classifications

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• H10P 14/45 Sputtering