Diffusion for doping of conductive or resistive layers

Full Title

Diffusion of dopants within, into, or out of wafers, substrates or parts of devices > Diffusion for doping of conductive or resistive layers

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS