Microstructural systems or auxiliary parts thereof

Child Classifications

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• B81B 2207/01 comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
• B81B 2207/03 Electronic circuits for micromechanical devices which are not application specific, e.g. for controlling, power supplying, testing, protecting
• B81B 2207/05 Arrays
• B81B 2207/07 Interconnects
• B81B 2207/09 Packages
• B81B 2207/11 Structural features, others than packages, for protecting a device against environmental influences
• B81B 2207/99 Microstructural systems or auxiliary parts thereof not provided for in B81B2207/01 - B81B2207/115