for making multi-layered devices, film deposition or growing

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Manufacture or treatment of microstructural devices or systems > in or on a substrate > for making multi-layered devices, film deposition or growing

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• B81C 2201/0176 Chemical vapour Deposition
• B81C 2201/0181 Physical Vapour Deposition [PVD], i.e. evaporation, sputtering, ion plating or plasma assisted deposition, ion cluster beam technology
• B81C 2201/0183 Selective deposition
• B81C 2201/019 Bonding or gluing multiple substrate layers
• B81C 2201/0191 Transfer of a layer from a carrier wafer to a device wafer
• B81C 2201/0197 Processes for making multi-layered devices not provided for in groups B81C2201/0176 - B81C2201/0192