Physical Vapour Deposition [PVD], i.e. evaporation, sputtering, ion plating or plasma assisted deposition, ion cluster beam technology

Full Title

Manufacture or treatment of microstructural devices or systems > in or on a substrate > for making multi-layered devices, film deposition or growing > Physical Vapour Deposition [PVD], i.e. evaporation, sputtering, ion plating or plasma assisted deposition, ion cluster beam technology