Integrating an electronic processing unit with a micromechanical structure

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Forming microstructural systems > Integrating an electronic processing unit with a micromechanical structure

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• B81C 2203/0707 Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure
• B81C 2203/0785 Transfer and j oin technology, i.e. forming the electronic processing unit and the micromechanical structure on separate substrates and joining the substrates