Interleave, i.e. simultaneously forming the micromechanical structure and the CMOS circuit

Full Title

Forming microstructural systems > Integrating an electronic processing unit with a micromechanical structure > Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure > Interleave, i.e. simultaneously forming the micromechanical structure and the CMOS circuit