CPC Subgroup
C01B 33/021 Preparation (chemical coating from the vapour phase C23C16/00)
Full Title
Silicon; Compounds thereof ( C01B21/00, C01B23/00 take precedence; persilicates C01B15/14; carbides C01B32/956) > Silicon (forming single crystals or homogeneous polycrystalline material with defined structure C30B) > Preparation (chemical coating from the vapour phase C23C16/00)
2 direct subcodes
Child Classifications
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- C01B 33/023 by reduction of silica or silica-containing material
- C01B 33/027 by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material