by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material

Full Title

Silicon; Compounds thereof ( C01B21/00, C01B23/00 take precedence; persilicates C01B15/14; carbides C01B32/956) > Silicon (forming single crystals or homogeneous polycrystalline material with defined structure C30B) > Preparation (chemical coating from the vapour phase C23C16/00) > by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material

Child Classifications

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• C01B 33/029 by decomposition of monosilane
• C01B 33/03 by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
• C01B 33/033 by reduction of silicon halides or halosilanes with a metal or a metallic alloy as the only reducing agents
• C01B 33/035 by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process