CPC Subgroup
C23C 14/048 Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > Coating on selected surface areas, e.g. using masks
C23C 14/048 Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > Coating on selected surface areas, e.g. using masks