CPC Main Group
C23C 14/00 Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
9 direct subcodes
Child Classifications
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- C23C 14/02 Pretreatment of the material to be coated (C23C14/04 takes precedence)
- C23C 14/04 Coating on selected surface areas, e.g. using masks
- C23C 14/06 characterised by the coating material ( , C23C14/04 take precedence)
- C23C 14/22 characterised by the process of coating
- C23C 14/58 After-treatment