CPC Subgroup
C23C 14/08 Oxides (C23C14/10 takes precedence)
Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the coating material ( , C23C14/04 take precedence) > Oxides (C23C14/10 takes precedence)
7 direct subcodes
Child Classifications
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