CPC Subgroup
C23C 14/14 Metallic material, boron or silicon
Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the coating material ( , C23C14/04 take precedence) > Metallic material, boron or silicon
3 direct subcodes
Child Classifications
Navigate with arrow keys, Enter to open
- C23C 14/16 on metallic substrates or on substrates of boron or silicon
- C23C 14/18 on other inorganic substrates
- C23C 14/20 on organic substrates