from metal halides

Full Title

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes (reactive sputtering or vacuum evaporation C23C14/00) > characterised by the deposition of metallic material > from metal halides

Child Classifications

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• C23C 16/10 Deposition of chromium only
• C23C 16/12 Deposition of aluminium only
• C23C 16/14 Deposition of only one other metal element