from metallo-organic compounds

Full Title

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes (reactive sputtering or vacuum evaporation C23C14/00) > characterised by the deposition of metallic material > from metallo-organic compounds

Child Classifications

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• C23C 16/20 Deposition of aluminium only