Reaction chambers; Boats for supporting the melt; Substrate holders

Full Title

Liquid-phase epitaxial-layer growth > Reaction chambers; Boats for supporting the melt; Substrate holders

Child Classifications

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• C30B 19/061
• C30B 19/062
• C30B 19/063
• C30B 19/064
• C30B 19/065
• C30B 19/066
• C30B 19/067
• C30B 19/068