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CPC Subgroup
C30B 19/08

Heating of the reaction chamber or the substrate

Full Title

Liquid-phase epitaxial-layer growth > Heating of the reaction chamber or the substrate

Top Applicants

Top 10 applicants by patent filingsfor class C30, 2013–2023, worldwide · Source: EPO PATSTAT

  1. CHINESE ACADEMY OF SCIENCES 1,052
  2. SUMCO CORPORATION JP 881
  3. APPLIED MATERIALS US 871
  4. SUMITOMO ELECTRIC INDUSTRIES JP 682
  5. SHIN ETSU HANDOTAI COMPANY JP 649
  6. SHIN-ETSU CHEMICAL COMPANY JP 506
  7. SUMCO CORPORATION 500
  8. SILTRONIC DE 491
  9. GLOBALWAFERS COMPANY TW 458
  10. NGK INSULATORS JP 379