Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]

Full Title

Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 > by measuring secondary emission from the material > using electron or ion > using incident electron beams, e.g. scanning electron microscopy [SEM] > Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]