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PCE
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CPC Subgroup
G01Q 60/16

Probes, their manufacture, or their related instrumentation, e.g. holders

Full Title

Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof > STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes > Probes, their manufacture, or their related instrumentation, e.g. holders