CPC Subgroup
G01Q 70/08 Probe characteristics
Full Title
General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00 > Probe characteristics
2 direct subcodes
Child Classifications
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- G01Q 70/10 Shape or taper
- G01Q 70/14 Particular materials