CPC Main Group
G01Q 70/00 General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
4 direct subcodes
Child Classifications
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- G01Q 70/02 Probe holders
- G01Q 70/06 Probe tip arrays
- G01Q 70/08 Probe characteristics
- G01Q 70/16 Probe manufacture