CPC Subgroup Additional Only
H01J 2237/041 Beam polarising means
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for controlling the discharge > Beam polarising means
H01J 2237/041 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for controlling the discharge > Beam polarising means