CPC Subgroup Additional Only
H01J 2237/04 Means for controlling the discharge
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for controlling the discharge
5 direct subcodes
Child Classifications
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- H01J 2237/041 Beam polarising means
- H01J 2237/043 Beam blanking
- H01J 2237/045 Diaphragms
- H01J 2237/047 Changing particle velocity
- H01J 2237/049 Focusing means