CPC Subgroup Additional Only
H01J 2237/0455 with variable aperture
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for controlling the discharge > Diaphragms > with variable aperture
H01J 2237/0455 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for controlling the discharge > Diaphragms > with variable aperture