CPC Subgroup Additional Only
H01J 2237/045 Diaphragms
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for controlling the discharge > Diaphragms
3 direct subcodes
Child Classifications
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- H01J 2237/0451 with fixed aperture
- H01J 2237/0455 with variable aperture
- H01J 2237/0456 Supports