CPC Subgroup Additional Only
H01J 2237/0475 decelerating
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for controlling the discharge > Changing particle velocity > decelerating
2 direct subcodes
Child Classifications
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- H01J 2237/04753 with magnetic means
- H01J 2237/04756 with electrostatic means