CPC Subgroup Additional Only
H01J 2237/0535 Mirror analyser
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Arrangements for energy or mass analysis > electrostatic > Mirror analyser
H01J 2237/0535 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Arrangements for energy or mass analysis > electrostatic > Mirror analyser