CPC Subgroup Additional Only
H01J 2237/05 Arrangements for energy or mass analysis
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Arrangements for energy or mass analysis
3 direct subcodes
Child Classifications
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- H01J 2237/053 electrostatic
- H01J 2237/055 magnetic
- H01J 2237/057 Energy or mass filtering