CPC Subgroup Additional Only
H01J 2237/1526 For X-Y scanning
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for deflecting or directing discharge > Magnetic means > For X-Y scanning
H01J 2237/1526 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for deflecting or directing discharge > Magnetic means > For X-Y scanning