CPC Subgroup Additional Only
H01J 2237/24405 Faraday cages
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Detection characterized by the detecting means > Faraday cages
H01J 2237/24405 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Detection characterized by the detecting means > Faraday cages