CPC Subgroup Additional Only
H01J 2237/2482 Optical means
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Components associated with the control of the tube > Optical means
H01J 2237/2482 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Components associated with the control of the tube > Optical means