CPC Subgroup Additional Only
H01J 2237/248 Components associated with the control of the tube
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Components associated with the control of the tube
2 direct subcodes
Child Classifications
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- H01J 2237/2482 Optical means
- H01J 2237/2485 Electric or electronic means