CPC Subgroup Additional Only
H01J 2237/2605 operating at elevated pressures, e.g. atmosphere
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion microscopes > Details > operating at elevated pressures, e.g. atmosphere
1 direct subcode
Child Classifications
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- H01J 2237/2608 with environmental specimen chamber