CPC Subgroup Additional Only
H01J 2237/2814 Measurement of surface topography
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion microscopes > Scanning microscopes > characterised by the application > Measurement of surface topography
2 direct subcodes
Child Classifications
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- H01J 2237/2815 Depth profile
- H01J 2237/2816 Length