CPC Subgroup Additional Only
H01J 2237/28 Scanning microscopes
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion microscopes > Scanning microscopes
7 direct subcodes
Child Classifications
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- H01J 2237/2801 Details
- H01J 2237/2802 Transmission microscopes
- H01J 2237/2803 characterised by the imaging method
- H01J 2237/2809 characterised by the imaging problems involved
- H01J 2237/2812 Emission microscopes
- H01J 2237/2813 characterised by the application
- H01J 2237/2818 Scanning tunnelling microscopes