CPC Subgroup Additional Only
H01J 2237/304 Controlling tubes
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Controlling tubes
5 direct subcodes
Child Classifications
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- H01J 2237/30405 Details
- H01J 2237/30433 System calibration
- H01J 2237/30455 Correction during exposure
- H01J 2237/30466 Detecting endpoint of process
- H01J 2237/30472 Controlling the beam